| DC Field | Value | Language |
|---|
| dc.contributor.author | Zakhvalinskii, V. S. | - |
| dc.contributor.author | Goncharov, I. Yu. | - |
| dc.contributor.author | Kudryavtsev, E. A. | - |
| dc.contributor.author | Piluk, E. A. | - |
| dc.contributor.author | Kolesnikov, D. A. | - |
| dc.date.accessioned | 2016-04-21T07:49:27Z | - |
| dc.date.available | 2016-04-21T07:49:27Z | - |
| dc.date.issued | 2014 | - |
| dc.identifier.citation | RF-Magnetron sputtering of Si3N4 and study of Si3N4/p-Si heterostructures / V. S. Zakhvalinskii [и др.] // Journal of Nanoelectronics and Optoelectronics. - 2014. - Vol.9, №4.-P. 570-575. - doi: http://dx.doi.org/10.1166/jno.2014.1627. | ru |
| dc.identifier.uri | http://dspace.bsu.edu.ru/handle/123456789/15686 | - |
| dc.description.abstract | Here we report the feasibility of using cheap and environmentally friendly RF-magnetron sputtering of Si3N4 and formation of Si3N4 nanostructured films with developed surface. p-Si(100) polished plates commonly used in photovoltaic structures were chosen as a substrate. Si3N4 film surface morphology was studied using atomic force microscopy | ru |
| dc.language.iso | en | ru |
| dc.subject | physics | ru |
| dc.subject | solid state physics | ru |
| dc.subject | nano-patterns | ru |
| dc.subject | RF magnetron sputtering | ru |
| dc.subject | thin films | ru |
| dc.subject | solar cells | ru |
| dc.subject | atomic force microscopy | ru |
| dc.title | RF-Magnetron sputtering of Si3N4 and study of Si3N4/p-Si heterostructures | ru |
| dc.type | Article | ru |
| Appears in Collections: | Статьи из периодических изданий и сборников (на иностранных языках) = Articles from periodicals and collections (in foreign languages)
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