| DC Field | Value | Language |
|---|
| dc.contributor.author | Zakhvalinskii, V. S. | - |
| dc.contributor.author | Abakumov, P. V. | - |
| dc.contributor.author | Piljuk, E. A. | - |
| dc.contributor.author | Rodriguez, G. V. | - |
| dc.contributor.author | Goncharov, I. Yu. | - |
| dc.contributor.author | Taran, S. V. | - |
| dc.date.accessioned | 2020-01-29T11:49:14Z | - |
| dc.date.available | 2020-01-29T11:49:14Z | - |
| dc.date.issued | 2015 | - |
| dc.identifier.citation | Temperature influence on the properties of thin Si₃N₄ films / V.S. Zakhvalinskii [и др.] // Journal of Nano- and Electronic Physics. - 2015. - Vol.7, №4.-Art. 04052. | ru |
| dc.identifier.uri | http://dspace.bsu.edu.ru/handle/123456789/28230 | - |
| dc.description.abstract | Applying Raman spectroscopy, small-angle x-ray scattering, and atomic force microscopy it were studied phase composition and surface morphology of nanoscale films Si₃N₄ (obtained by RF magnetron sputtering) | ru |
| dc.language.iso | en | ru |
| dc.subject | physics | ru |
| dc.subject | solid state physics | ru |
| dc.subject | thin films | ru |
| dc.subject | nanoscale films | ru |
| dc.subject | properties | ru |
| dc.subject | temperature influence | ru |
| dc.subject | Raman spectroscopy | ru |
| dc.subject | atomic force microscopy | ru |
| dc.subject | small-angle X-ray scattering | ru |
| dc.title | Temperature influence on the properties of thin Si₃N₄ films | ru |
| dc.type | Article | ru |
| Appears in Collections: | Статьи из периодических изданий и сборников (на иностранных языках) = Articles from periodicals and collections (in foreign languages)
|
