http://dspace.bsu.edu.ru/handle/123456789/41349| Title: | The effect of vacuum annealing on the structure and properties of the electrically conductive a-CN coating |
| Authors: | Poplavsky, A. Kudriavtsev, Yu. Kolpakov, A. Pilyuk, E. Goncharov, I. |
| Keywords: | physics optics nitrogenated amorphous carbon pulsed vacuum arc deposition electrical resistivity |
| Issue Date: | 2021 |
| Citation: | The effect of vacuum annealing on the structure and properties of the electrically conductive a-CN coating / A. Poplavsky [et al.] // Vacuum. - 2021. - Vol.184.-Art. 109919. - Doi: 10.1016/j.vacuum.2020.109919. - URL: https://www.sciencedirect.com/science/article/pii/S0042207X20307788?via%3Dihub |
| Abstract: | Electrically conductive amorphous carbon nitride (a-CN) coatings were deposited onto various substrates by pulsed vacuum-arc sputtering of a graphite cathode with simultaneous irradiation of the substrate with nitrogen ions. Deposition temperature was less than 60 ◦C. We investigated the effect of vacuum annealing at a temperature of 600◦С on the elemental composition, structure, electrical and optical properties of the obtained films. It was found that the elemental composition of the coating practically does not change over the thickness of the coating after annealing, while the remaining characteristics change significantly |
| URI: | http://dspace.bsu.edu.ru/handle/123456789/41349 |
| Appears in Collections: | Статьи из периодических изданий и сборников (на иностранных языках) = Articles from periodicals and collections (in foreign languages) |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Kolpakov_The effect.pdf | 5.17 MB | Adobe PDF | View/Open |
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