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Stoichiometry, phase composition, and properties of superhard nanostructured Ti–Hf–Si–N coatings obtained by deposition from high- frequency vacuum–arc discharge 167

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Stoichiometry, phase composition, and properties of superhard nanostructured Ti–Hf–Si–N coatings obtained by deposition from high- frequency vacuum–arc discharge 2 0 2 8 15 24 3

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