Change of internal stress of carbon superhard condensates at a process of annealing

Abstract

Superhard carbon coatings with thickness from 5 nm up to 10 mm were obtained by vacuum-arc deposition of carbon plasma on sublayers from stainless steels, titanium and silicon under the temperature from 50 up to 150 8C. Correlation dependences between conditions of formation of carbon condensates and change of internal stresses in them at a process of annealing in a range of temperatures from 200 up to 475 8C were examined. It was shown that the character of internal stresses changing at a process of annealing of carbon condensates had proof correlation with the parameters of deposition and it could be used for identification of coatings and for control of their properties