http://dspace.bsuedu.ru/handle/123456789/46962| Title: | Photon assisted particle irradiation of silicon |
| Authors: | Mordkovlch, V. N. Batabanellkov, M. Y. |
| Keywords: | science physics photons irradiation silicon crystals semiconductors radiation |
| Issue Date: | 1997 |
| Citation: | Mordkovlch, V.N. Photon assisted particle irradiation of silicon / V.N. Mordkovlch, M.Y. Batabanellkov ; Institute of microelectronics technology and high purity materials, Russian academy of sciences // Научные ведомости Белгородского государственного университета. - 1997. - № 2 (5). - С. 191-195. |
| Abstract: | Since radiation methods are widely used in microelectronics technology, title problem still stand to govern the radiation defects behavior in the irradiated semiconductor, especially in silicon crystals |
| URI: | http://dspace.bsu.edu.ru/handle/123456789/46962 |
| Appears in Collections: | № 2 (5) |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Mordkovich_Photon.pdf | 280.38 kB | Adobe PDF | View/Open |
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