DC Field | Value | Language |
dc.contributor.author | Kudryashov, S. I. | - |
dc.contributor.author | Golosov, E. V. | - |
dc.contributor.author | Ionin, A. A. | - |
dc.contributor.author | Kolobov, Yu. R. | - |
dc.contributor.author | Ligachev, A. E. | - |
dc.date.accessioned | 2013-05-23T08:08:07Z | - |
dc.date.available | 2013-05-23T08:08:07Z | - |
dc.date.issued | 2010 | - |
dc.identifier.citation | Evolution of black silicon nano- and micro-scale surface topologies upon femtosecond laser irradiation / S. I. Kudryashov, E. V. Golosov, Yu. R. Kolobov et al. ; Belgorod State University // Silicon photonics and photonic integrated circuits II, edited by Giancarlo Cesare Righini, Proceedings of SPIE. - 2010. - Vol.7719.-Art. 771921. - doi: 10.1117/12.854511. | ru |
dc.identifier.uri | http://dspace.bsu.edu.ru/handle/123456789/4784 | - |
dc.description.abstract | Gradual evolution of silicon surface topology from one-dimensional to two-dimensional nanogratings and then to isotropic sets of nanospikes was observed by increasing IR and UV femtosecond laser irradiation dose (the variable number of incident laser pulses at the constant laser fluence). The fundamental mechanisms of these topological transformations are discussed | ru |
dc.language.iso | en | ru |
dc.subject | physics | ru |
dc.subject | optics | ru |
dc.subject | femtosecond laser pulses | ru |
dc.subject | silicon | ru |
dc.subject | surface nanostructure | ru |
dc.subject | microstructure | ru |
dc.subject | isotropic sets | ru |
dc.subject | topologic transformations | ru |
dc.title | Evolution of black silicon nano- and micro-scale surface topologies upon femtosecond laser irradiation | ru |
dc.type | Article | ru |
dc.identifier.citationpublication | Silicon photonics and photonic integrated circuits II, edited by Giancarlo Cesare Righini, Proceedings of SPIE | ru |
dc.identifier.citationvolume | 7719 | ru |
dc.description.refereed | yes | ru |
dc.description.institution | Belgorod State University | ru |
Appears in Collections: | Статьи из периодических изданий и сборников (на иностранных языках) = Articles from periodicals and collections (in foreign languages)
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