http://dspace.bsu.edu.ru/handle/123456789/64221| Title: | Detonation Technology in Producing Metal-Ceramic Powder Targets for Magnetron Sputtering |
| Authors: | Sirota, V. V. Zaitsev, S. V. Prokhorenkov, D. S Limarenko, М. V. Skiba, А. A. Kovaleva, M. G. |
| Keywords: | technique metal processing multichamber detonation device detonation spraying multicomponent cathode target magnetron sputtering |
| Issue Date: | 2023 |
| Citation: | Detonation Technology in Producing Metal-Ceramic Powder Targets for Magnetron Sputtering / V.V. Sirota, S.V. Zaitsev, D.S. Prokhorenkov [et al.] // Russian Engineering Research. - 2023. - Vol.43, №6.-P. 735-738. - Doi: 10.3103/S1068798X23060230. - Refer.: p. 738. |
| Abstract: | The authors of the article propose an innovative approach to the manufacture of flat and cylindrical composite metal-ceramic targets (cathodes) for magnetron sputtering: the use of high-frequency multi-chamber detonation accelerators |
| URI: | http://dspace.bsu.edu.ru/handle/123456789/64221 |
| Appears in Collections: | Статьи из периодических изданий и сборников (на иностранных языках) = Articles from periodicals and collections (in foreign languages) |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Sirota_Detonation Technology_23.pdf | 880.41 kB | Adobe PDF | View/Open |
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