| DC Field | Value | Language |
|---|
| dc.contributor.author | Kolpakov, A. Ya. | - |
| dc.contributor.author | Druchinina, O. A. | - |
| dc.contributor.author | Kharchenko, V. A. | - |
| dc.date.accessioned | 2013-05-20T08:27:03Z | - |
| dc.date.available | 2013-05-20T08:27:03Z | - |
| dc.date.issued | 2009 | - |
| dc.identifier.citation | The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon / A.Ya. Kolpakov, O.A. Druchinina, V.A. Kharchenko ; Belgorod State University // Nanotechnologies in Russia. - 2009. - Vol.4, N3-4.-P. 166-169.. - doi: 10.1134/S1995078009030033. | ru |
| dc.identifier.uri | http://dspace.bsu.edu.ru/handle/123456789/4728 | - |
| dc.description.abstract | The behavior of silicon wafers in the starting state (after both irradiation with nitrogen ions and after nitrogen ion irradiation and the deposition of an 80-nm-thick carbon coating) has been investigated | ru |
| dc.language.iso | en | ru |
| dc.subject | equipment | ru |
| dc.subject | chemical production | ru |
| dc.subject | silicon wafers | ru |
| dc.subject | ions | ru |
| dc.subject | nitrogen ions | ru |
| dc.subject | carbon coating | ru |
| dc.subject | compressive stresses | ru |
| dc.subject | resistance silicon | ru |
| dc.subject | silicon | ru |
| dc.title | The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon | ru |
| dc.type | Article | ru |
| dc.identifier.citationpublication | Nanotechnologies in Russia | ru |
| dc.identifier.citationnumber | 3-4 | ru |
| dc.identifier.citationvolume | 4 | ru |
| dc.identifier.citationfirstpage | 166 | ru |
| dc.identifier.citationendpage | 169 | ru |
| dc.description.refereed | yes | ru |
| dc.description.institution | Belgorod State University | ru |
| Appears in Collections: | Статьи из периодических изданий и сборников (на иностранных языках) = Articles from periodicals and collections (in foreign languages)
|
